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Studies on the preparation and characterization of TiO2 thin film

P. Dhanalakshmi, R. Abirami, G. Rathika, V. Murugavalli, A. Ayeshamariam, N. Nagarani, M. Jayachandran


Titanium dioxide thin film was deposited on the class substrate by using Ti(C10H14O5), and characterized by using X-Ray diffractometer (XRD) and scanning electron microscopy (SEM), SEM analysis was discussed for 350º C. FTIR analysis gives the vibrational modes of vibrations of the material. The diffraction plane is (101) and crystal size was as 50 nm. The morphological studies of the sample inferred that the size was nearly in micrometer due to the agglomeration of particles which is in sphereical.

Keywords; SEM, X-ray diffractometer, FTIR and TiO2 thin film

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